化學藥品之MSDS

黃光室:

1.正光阻 FH6400

2.負光阻 HR-200

3.正光阻 AZ6112

4.正光阻 AZ P4620

5.正光阻 AZ5214E

6.顯影液 FHD 5(FH 6400)

7.顯影液 AZ 300MIF DEVELOPER(AZ 6112)

8.顯影液 AZ 400K

9.顯影液 DEVELOPER

10.負光阻顯影液 WNRD

11.正光阻稀釋液 AZ_5200

12.負光阻定影液 NBA

13.氯苯 Chlorobenzene

其它藥品:

1.(電子級)丙酮 ACETONE

2.(電子級)硫酸 SULFURIC ACID

3.(電子級)鹽酸 HYDROCHLORIC ACID

4.(電子級)硝酸 NTTRIC ACID

5.磷酸86% PHOSPHORIC ACID

6.氟化氫 HYDROGEN FLUORIDE

7.異丙醇 ISOPROPYL ALCOHOL

8.氧氯化磷 PHOSPHORUS OXYCHLORIDE

9.甲醇 METHYL ALCOHOL

10.冰醋酸 ACTIC ACID

11.BORON HYDRIDE

12.CHLOROSILANE

13.氫氣 HYDROGEN

14.氦氣 HELIUM

15.氧氣 OXYGEN

16.一氧化二氮 NITROUS OXIDE

17.過氧化氫 HYDROGEN PREOXIDE

18.SHIELDING GAS MIXTURE (FOR WELDING PROCESSES)

19.矽甲烷 SILANCE

20.二矽乙烷 DISILANCE

21.無水氨氣 AMMONIA

22.二氯矽甲烷 DICHLOROSILANCE

23.氯苯 Chlorobenzene

24.二氧化矽蝕刻液BUFFERED OXIDE ETCH

25.蝕刻液(酸洗液)

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