| 熱阻絲蒸鍍系統(Thermal Coater) | 操作規範 | 考核表 | Operation Manual | Qualification Record Sheet |
R120黃光周邊
附屬機台(Lithography include:
Mask Aligner, Photo Resist Spinner, Vacuum Oven, Optical Microscope) | 操作規範 | 考核表 | Operation Manual | Qualification Record Sheet |
| 真空濺鍍系統 A (Sputtering System A) | 操作規範 | 考核表 | Operation Manual | Qualification Record Sheet |
| 真空濺鍍系統 B (Sputtering System B) | 操作規範 | 考核表 | Operation Manual | Qualification Record Sheet |
| 橢圓測厚儀(Ellipsometer) | 操作規範 | 考核表 | Operation Manual | Qualification Record Sheet |
| 雙電子槍蒸鍍系統A (Dual E-Gun Evaporation System A) | 操作規範 | 考核表 | Operation Manual | Qualification Record Sheet |
| 雙電子槍蒸鍍系統B (Dual E-Gun Evaporation System B) | 操作規範 | 考核表 | Operation Manual | Qualification Record Sheet |
| 濕式工作台 (Wet Bench) | 操作規範 | 考核表 | Operation Manual | Qualification Record Sheet |
| 原子層化學氣相沉積系統(ALD) | 操作規範 | 考核表 | Operation Manual | Qualification Record Sheet |
| 原子層化學氣相沉積系統(Picosun,ALD) | 操作規範 | 考核表 | Operation Manual | Qualification Record Sheet |
| 原子層化學氣相沉積系統(Veeco,ALD) | 操作規範 | 考核表 | Operation Manual | Qualification Record Sheet |
| 高解析度場發射掃描電子顯微鏡暨能量散佈分析儀(SEM S-4700I) | 操作規範 | 考核表 | Operation Manual | Qualification Record Sheet |
| 氧化擴散系統(Oxidation & Diffusion Furnaces) | 操作規範 | 考核表 | Operation Manual | Qualification Record Sheet |
| 高密度活性離子蝕刻系統 (HDP-RIE) | 操作規範 | 考核表 | Operation Manual | Qualification Record Sheet |
| 介電材料活性離子蝕刻系統 B (RIE 200L) | 操作規範 | 考核表 | Operation Manual | Qualification Record Sheet |
| 電漿輔助化學氣相沉積系統(PECVD)-A | 操作規範 | 考核表 | Operation Manual | Qualification Record Sheet |
| 電漿輔助化學氣相沉積系統(PECVD)-B | 操作規範 | 考核表 | | |
| 複晶矽活性離子蝕刻系統 (Poly-RIE) | 操作規範 | 考核表 | Operation Manual | Qualification Record Sheet |
| 雙面光罩對準曝光機(Double Side Mask Aligner) | 操作規範 | 考核表 | | |
| 介電材料活性離子蝕刻系統 A (RIE-400iP) | 操作規範 | 考核表 | | |
| 低壓化學氣相沉積系統 (LPCVD) | 操作規範 | 考核表 | | |
| 全光譜反射式膜厚量測儀 (Reflectometer) | 操作規範 | 考核表 | | |
| 聚焦離子束與電子束顯微系統 (FIB) | 操作規範 | 考核表 | | |
| 冷場發射掃描式電子顯微鏡暨能量散佈分析儀器(SEM SU-8010) | 操作規範 | 考核表 | | |
| 圖形產生系統(Pattern Generator) | 操作規範 | 考核表 | | |
| 矽深蝕刻系統(Si Deep-RIE) | 操作規範 | 考核表 | | |
| 高真空鍍膜系統(HVD System) | 操作規範 | 考核表 | | |
| 探針式輪廓儀(Dektak XT) | 操作規範 | 考核表 | | |