濕式工作台:     
1.濕式工作台 (Wet Bench)
                                       
爐管系統(Furnace Systems)
1.氧化擴散系統 (Oxidation & Diffusion Furnaces )

2.快速退火系統 (Rapid Temperture Annealing, RTA)

微影系統(Lithograph
沉積系統(Chemical Vapor Deposition Systems)
1.低壓化學氣相沉積系統 (Low Pressure Chemical Vapor Deposition, LPCVD)
2.電漿輔助化學氣相沉積系統A(Plasma-Enhanced Chemical Vapor Deposition, PECVD-A)
3.電漿輔助化學氣相沉積系統B(Plasma-Enhanced Chemical Vapor Deposition, PECVD-B)
4.原子層化學氣相沉積系統(Atomic Layer Chemical Vapor Deposition System, ALD)

5.Picosun原子層化學氣相沉積系統(Atomic Layer Deposition System, Picosun-ALD)

微影系統(Lithography Systems)
1.光罩製作系統(雷射圖形產生系統)  (Laser Pattern Generator, DWL-200)

2.圖形產生系統(Pattern Generator)

曝光機 (屬貴儀機台之曝光機請至國科會基礎研究核心設施預約服務管理系統中之”光罩對準曝光機Aligner”預約)
1.R120黃光周邊附屬機台 (Litho Accessories Machine)
2.雙面光罩對準曝光機(A) (Double Side Mask Aligner (A))

3.雙面光罩對準曝光機(B) (Double Side Mask Aligner (B))

蝕刻系統(Dry Etch Systems)
1.導電性材料活性離子蝕刻機:
(1).高密度活性離子蝕刻系統 (High Density Plasma Reactive Ion Etching System, HDP-RIE)
(2).矽深蝕刻系統(Si Deep-RIE)
(3).矽淺蝕刻系統(Shallow Si RIE)
2.介電性材料活性離子蝕刻系統:
(1).介電材料活性離子蝕刻系統 A(Dielectric Materials Reactive Ion Etching SystemRIE-400iP-1
(2).介電材料活性離子蝕刻系統 B(Dielectric Materials Reactive Ion Etching System, RIE 200L
(3).介電質蝕刻系統 (Dielectric Materials Reactive Ion Etching SystemRIE-400iP-2

蒸鍍系統(Vacuum Deposition Systems)
1.熱蒸鍍系統:
(1).熱阻絲蒸鍍系統 (Thermal Evaporation Coater)
(2).雙電子槍蒸鍍系統 A (Dual E-Gun Evaporation System A)
(3).雙電子槍蒸鍍系統 B (Dual E-Gun Evaporation System B)
2.高真空鍍膜系統:
(1).真空濺鍍系統 A (Sputtering System A)
(2).真空濺鍍系統 B (Sputtering System B) 
(3).高真空鍍膜系統 (High Vacuum Deposition System)

3.(電子系設備)電子槍蒸鍍系統 (E-Beam Evaporator System) (鍍金,現金付費)

分析系統(Analysis Systems)
1.聚焦離子束與電子束顯微系統 (Dual beam [focused ion beam & electron beam] System)  FIB
2.冷場發射掃描式電子顯微鏡暨能量散佈分析儀器 (SEM SU-8010) (Cold Field Emission Scanning Electron Microscope (Hitachi SU8010) & Energy Dispersive Spectrometer)
3.高解析度場發射掃描電子顯微鏡暨能量散佈分析儀 (SEM S-4700I) (High-Resolution Cold Field Emission Scanning Electron Microscope & Energy Dispersive Spectrometer, SEM, EDS)
6.四點探針 (4-point Probe)
7.橢圓測試儀 (Ellipsometer)